Ferroelectric hafnia-on-semiconductor frequency control devices: Unleashing the power of nano-mechanics on chip

Presenter: Roozbeh Tabrizian, Associate Professor, NELMS Rising Star Endowed Professor, Department of Electrical and Computer Engineering, University of Florida

This presentation will focus on the development of nanoscale hafnia transducers and their application in creating semiconductor nanomechanical resonators, oscillators, and filters. Specifically, it will cover (1) temperature-insensitive hafnia resonators for on-chip clock generation; (2) massively integrated ferroelectric-gate fin filters for microwave spectral processing; and (3) self-amplified ferroelectric-on-SiGe resonators for electronics-free sustained oscillation.

About Roozbeh Tabrizian

Tabrizian is an associate professor and the NELMS Rising Star Endowed Professor at the Department of Electrical and Computer Engineering, University of Florida. He received his B.S. (2007) degree in Electrical Engineering from Sharif University of Technology, Iran, and the Ph.D. (2013) degree in Electrical and Computer Engineering from the Georgia Institute of Technology. He was a post-doctoral scholar (2014-2015) at the University of Michigan. His research interests include semiconductor micro- and nano-electro-mechanical systems for frequency control applications; microwave acoustics; and novel ferroic materials and devices. Tabrizian has received the DARPA Director's Fellowship Award (2021), a DARPA Young Faculty Award (2019), and an NSF CAREER Award (2018). He is an associate editor of the IEEE Journal of Microelectromechanical Systems (JMEMS) and Sensors and Actuators A: Physical. Tabrizian's research has resulted in more than 80 journal and refereed conference papers and 10 patents. Tabrizian and his students are recipients and finalists of multiple outstanding paper awards at top-tier conferences such as IEEE MEMS, IEEE IFCS, IEEE IEDM, IEEE NEMS, and Transducers.